Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields

Materials Science in Semiconductor Processing

Volumn 5, Issue 4-5 SPEC., 2002, Pages 341-345

  Kakimoto, Koichi ^a   Tashiro, Akimasa ^a   Ishii, Hideo ^a   Shinozaki, Takashige ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Cusp shaped magnetic fields; Electromagnetic force; Silicon

Indexed keywords

ELECTROMAGNETIC FIELDS; HEAT CONVECTION; MELTING; SEMICONDUCTING SILICON;

ELECTROMAGNETIC FORCES;

CRYSTAL GROWTH FROM MELT;

EID: 0036960083     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00135-X     Document Type: Conference Paper

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