High-performance single-crystalline-silicon TFTs on a non-alkali glass substrate

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 565-568

  Sano, Yasuyuki ^a   Takei, Michiko ^a   Hara, Akito ^a   Sasaki, Nobuo ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTALLIZATION; GLASS; GRAIN BOUNDARIES; SINGLE CRYSTALS;

LASER SCANNING;

THIN FILM TRANSISTORS;

EID: 0036927519     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. A. Hara et al.: Technical Digest of 2001 IEDM, p.747.
2. A. Hara et al.:Jpn. J. Appl. Phys.41 (2002) L311.
3. J. S. Im et al.: Phys. Stat. Sol. (a) 166 (1998) 603.
4. C-H. Oh: IEEE Electron Devices Lett. 22 (2001) 20.
5. Y. Helen et al.: Thin Solid Film 383 (2001) 143.
6. K. Makihira et al: 2001 Active-Matrix Liquid-Crystal Displays - TFT Technologies and Related Materials - (Tokyo, 2001) p. 235.
7. A. Hara et al.: Technical Digest of 2000 IEDM, p. 209.