Sputtered tantalum as a structural material for surface micromachined RF switches

Materials Research Society Symposium - Proceedings

Volumn 729, Issue , 2002, Pages 89-94

  Sedky, Sherif ^a   Fiorini, Paolo ^a   Witvrouw, Ann ^a   Baert, Kris ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELASTIC MODULI; ELECTRIC CONDUCTIVITY; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; SPUTTERING; STRESSES;

MEAN STRESS; STRESS GRADIENT; SURFACE MICROMACHINED SWITCHES;

TANTALUM;

EID: 0036925166     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-729-u3.3     Document Type: Conference Paper

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