Designing thermally uniform MEMS hot micro-bolometers

Materials Research Society Symposium - Proceedings

Volumn 729, Issue , 2002, Pages 215-220

  Moelders, Nicholas ^a   Pralle, Martin U ^a   McNeal, Mark P ^a   Puscasu, Irina ^a   Last, Lisa ^a   Ho, William ^a   Greenwald, Anton C ^a   Daly, James T ^a   Johnson, Edward A ^a   George, Thomas ^b  

^a Ion Optics Inc   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CHEMICAL SENSORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SINGLE CRYSTALS; THERMAL EFFECTS;

CHEMICAL DETECTION; GAS CONCENTRATION; INFRARED GAS; MICROBOLOMETERS; SENSOR-CHIP; TEMPERATURE UNIFORMITY;

SILICON;

EID: 0036924690     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-729-u5.2     Document Type: Conference Paper

References (8)

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2. E. A. Johnson and A. Bodkin, Patent Pending.
3. A.C. Greenwald, J.T. Daly, E.A. Johnson, B. Kinkade, M. McNeal, M. Pralle, N. Moelders, T. George, D. Choi, R. Biswas and I. El-Kady, "Narrow Band Emission From Lithographically Defined Bandgap Structures in Silicon: matching Theory and Experiment", Mat. Res. Sym. Proc., Nov 2000.
4. S.Y. Lin, J.G. Fleming, E. Chow, J. Bur, K.K. Choi, and A. Goldberg, "Enhancement and suppression of thermal emission by a three-dimensional photonic crystal", Phys. Rev. B, 62 (4), pp. 2243-2246, 2000
5. E. A. Johnson, Patent No. 5838016.
6. R. Maboudian, W. R. Ashurst, C. Carraro, Sensor and Actuators, 82 (1-3), pp. 219-223, 2000.
7. S. Clausen, A. Morgenstjerne, O. Rathmann, Applied Optics. 35: 5683-5691 (1996).
8. B.G. Streetman, Solid State Electronic Devices, Prentice Hall, New Jersey, 1995.