Studies of liquid-phase deposition-oxide/InP structure by liquid-phase deposition

Journal of Electronic Materials

Volumn 31, Issue 12, 2002, Pages 1309-1315

  Huang, Chien J ^a  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

LPD; MOS capacitor; Oxide InP

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION; ENERGY DISPERSIVE SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAKAGE CURRENTS; MISFET DEVICES; MOS CAPACITORS; REFRACTIVE INDEX; SILICA; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

LIQUID PHASE DEPOSITION (LPD);

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0036918962     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0113-8     Document Type: Article

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