Accuracy of electrostatic lens computations with FOFEM

Ultramicroscopy

Volumn 93, Issue 3-4, 2002, Pages 263-270

  Lencová, Bohumila ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Accuracy of computation; Electrostatic lenses; Finite element method

Indexed keywords

CALCULATIONS; ELECTROSTATIC LENSES; FINITE ELEMENT METHOD; PERSONAL COMPUTERS;

MESH POINTS;

COMPUTER AIDED MANUFACTURING;

ACCURACY; ARTICLE; CALCULATION; DENSITY; ELECTRIC POTENTIAL; ELECTRICITY; FIRST ORDER FINITE ELEMENT METHOD; LENS; MICROCOMPUTER; TECHNIQUE;

EID: 0036890990     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(02)00283-8     Document Type: Article

References (12)

1. Hawkes P.W., Kasper E. Principles of Electron Optics. 1996;Academic Press, New York.
2. E. Munro, in: J. Orloff (Ed.), Handbook of Charged Particle Optics, CRC Press, Boca Raton, FL, 1997.
3. Lencová B. Nucl. Instrum. Methods A. 427:1999;329.
4. B. Lencová, in: J. Orloff (Ed.), Handbook of Charged Particle Optics, CRC Press, Boca Raton, FL, 1997.
5. Lencová B., Lenc M. Rev. Sci. Instrum. 68:1997;4409.
6. E. Kasper, F. Lenz, Electron Microscopy, Vol. I, Seventh European Congress Electron Microscopy Foundation, Leiden, 1980, p. 10.
7. Lencová B., Lenc M. Scanning Electron Microscopy. 86(Part III):1986;897.
8. Chmelík J., Barth J.E. SPIE. 2014:1993;133.
9. Khursheed A. The Finite Element Method in Charged Particle Optics. 1999;Kluwer, Boston.
10. Lencová B. Nucl. Instrum. Methods A. 427:1999;329.
11. Zhu X., Liu H., Rouse J., Munro E. SPIE. 2858:1996;68.
12. Cubric D., Lencová B., Read F.H., Zlámal J. Nucl. Instrum Methods A. 427:1999;357.