Field function evaluation techniques for electron lenses and deflectors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2858, Issue , 1996, Pages 68-80

  Zhu, Xieqing ^a   Liu, Haoning ^a   Rouse, John ^a   Munro, Eric ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD FUNCTIONS; PARTICLE DEFLECTORS;

ABERRATIONS; CHARGED PARTICLES; ELECTRODES; ELECTRON LENSES; FINITE ELEMENT METHOD; FUNCTION EVALUATION;

ELECTRON LENSES;

EID: 0030412243     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)