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Volumn 22, Issue 13, 2002, Pages 2371-2378
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Production of silicon containing particles by laser induced reaction of silane with methane, ethane and acetylene
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Author keywords
Powders gas phase reaction; Si; SiC; X ray absorption spectra
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Indexed keywords
LASER BEAM EFFECTS;
POWDERS;
SCANNING ELECTRON MICROSCOPY;
SILANES;
SILICON;
X RAY DIFFRACTION;
AGGLOMERATED SPHERES;
CERAMIC MATERIALS;
SILICON;
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EID: 0036884670
PISSN: 09552219
EISSN: None
Source Type: Journal
DOI: 10.1016/S0955-2219(02)00008-0 Document Type: Article |
Times cited : (7)
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References (36)
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