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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11, 2002, Pages 6493-6497

Growth and characterization of diamond films on SiO2/Si substrates

(6) Jiang, Nan a Noguchi, Satoshi a Nishimura, Kazuhito a,b Inaoka, Takeshi a Shintani, Yoshihiro a Hiraki, Akio a,c

a UNIVERSITY OF TOKUSHIMA (Japan)

b Kochi Prefecture Industrial Technology Center (Japan)

c KOCHI UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

Cracks; Diamond films; MPECVD; Shrinkage; SiO2 Si substrates

Indexed keywords

CHARACTERIZATION; CRACK INITIATION; FILM GROWTH; INSULATING MATERIALS; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SHRINKAGE; SILICA; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

INSULATING WAFERS;

DIAMOND FILMS;

EID: 0036872483 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.6493 Document Type: Article

Times cited : (1)

References (13)

1
- 0009661538
- J. C. Angus and C. C. Hayman: Science 241 (1988) 913.
- (1988) Science , vol.241 , pp. 913
- Angus, J.C.¹ Hayman, C.C.²

2
- 0001189864
- M. Werner and R. Locher: Rep. Prog. Phys. 61 (1998) 1665.
- (1998) Rep. Prog. Phys. , vol.61 , pp. 1665
- Werner, M.¹ Locher, R.²

3
- 0000804227
- R. Kohl, C. Wild, N. Herres, P. Koidl, B. R. Stoner and J. T. Glass: Appl. Phys. Lett. 63 (1993) 1792.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1792
- Kohl, R.¹ Wild, C.² Herres, N.³ Koidl, P.⁴ Stoner, B.R.⁵ Glass, J.T.⁶

4
- 0012484035
- Z. Sun, Z. Zheng, N. Xu, Y. Sun, R. Ji and W. Zhao: J. Appl. Phys. 76 (1994) 4446.
- (1994) J. Appl. Phys. , vol.76 , pp. 4446
- Sun, Z.¹ Zheng, Z.² Xu, N.³ Sun, Y.⁴ Ji, R.⁵ Zhao, W.⁶

5
- 0001738920
- T. Tachinaba, Y. Yokota, K. Miyata, T. Onishi, K. Kobashi, M. Tarutani, Y. Takai, R. Shimizu and Y. Shintani: Phys. Rev. B 56 (1997) 15967.
- (1997) Phys. Rev. B , vol.56 , pp. 15967
- Tachinaba, T.¹ Yokota, Y.² Miyata, K.³ Onishi, T.⁴ Kobashi, K.⁵ Tarutani, M.⁶ Takai, Y.⁷ Shimizu, R.⁸ Shintani, Y.⁹

6
- 0028539789
- P. W. May, C. A. Rego, C. G. Trevor, E. C. Williamson, M. N. R. Ashfold, K. N. Rosser and N. M. Everitt: Diamond Relat. Mater. 3 (1994) 1375.
- (1994) Diamond Relat. Mater. , vol.3 , pp. 1375
- May, P.W.¹ Rego, C.A.² Trevor, C.G.³ Williamson, E.C.⁴ Ashfold, M.N.R.⁵ Rosser, K.N.⁶ Everitt, N.M.⁷

7
- 0026622175
- C. P. Sung and H. C. Shih: J. Mater. Res. 7 (1992)105.
- (1992) J. Mater. Res. , vol.7 , pp. 105
- Sung, C.P.¹ Shih, H.C.²

8
- 0012584791
- B. E. Deal: J. Electrochem. Soc. 110 (1963) 527.
- (1963) J. Electrochem. Soc. , vol.110 , pp. 527
- Deal, B.E.¹

9
- 0029516711
- C. Zuikeer, A. R. Krauss, D. M. Guren, X. Pan, J. C. Li, R. Csencsits, A. Erdemir, C. Bindal and G. Fenske: Thin Solid Films 270 (1995) 154.
- (1995) Thin Solid Films , vol.270 , pp. 154
- Zuikeer, C.¹ Krauss, A.R.² Guren, D.M.³ Pan, X.⁴ Li, J.C.⁵ Csencsits, R.⁶ Erdemir, A.⁷ Bindal, C.⁸ Fenske, G.⁹

10
- 0000911372
- J. Lee, B. Hong, R. Messier and R. W. Collins: Appl. Phys. Lett. 69 (1996) 1716.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1716
- Lee, J.¹ Hong, B.² Messier, R.³ Collins, R.W.⁴

11
- 0001505671
- D. Zhou, A. R. Krauss, L. C. Qin and D. M. Gruen: J. Appl. Phys. 82 (1997) 4547.
- (1997) J. Appl. Phys. , vol.82 , pp. 4547
- Zhou, D.¹ Krauss, A.R.² Qin, L.C.³ Gruen, D.M.⁴

12
- 0034275792
- N. Jiang, S. Kujime, I. Ota, T. Inaoka, Y. Shintani, H. Makita, A. Hatta and A. Hiraki: J. Cryst. Growth 218 (2000) 265.
- (2000) J. Cryst. Growth , vol.218 , pp. 265
- Jiang, N.¹ Kujime, S.² Ota, I.³ Inaoka, T.⁴ Shintani, Y.⁵ Makita, H.⁶ Hatta, A.⁷ Hiraki, A.⁸

13
- 0012535415
- Ed. 131st Committee (Thin Film) of Japan Society for the Promotion of Science (Ohmsha, Tokyo) [in Japanese].
- Thin Film Handbook, ed. 131st Committee (Thin Film) of Japan Society for the Promotion of Science (Ohmsha, Tokyo, 1983) p. 11 [in Japanese].
- (1983) Thin Film Handbook , pp. 11

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