Future challenges for MOVPE - An industrial perspective

Journal of Materials Science: Materials in Electronics

Volumn 13, Issue 11, 2002, Pages 679-682

  Bland, S W ^a  

^a IQE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ENTERPRISE RESOURCE PLANNING; METALLORGANIC VAPOR PHASE EPITAXY; PRODUCT DEVELOPMENT; RECYCLING;

DEVICE-LEVEL QUALIFICATION;

MATERIALS SCIENCE;

EID: 0036865330     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020670428588     Document Type: Article

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