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Volumn 4, Issue 11, 2002, Pages 880-883
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Amorphous SiC:H-layers from precursors
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
CATALYSTS;
CHEMICAL VAPOR DEPOSITION;
POLYMERS;
PYROLYSIS;
SPIN COATING;
STOICHIOMETRY;
SYNTHESIS (CHEMICAL);
VISCOSITY;
GAS-PHASE PROCESSES;
SILICON CARBIDE;
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EID: 0036863817
PISSN: 14381656
EISSN: None
Source Type: Journal
DOI: 10.1002/1527-2648(20021105)4:11<880::AID-ADEM880>3.0.CO;2-O Document Type: Article |
Times cited : (2)
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References (12)
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