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Volumn 4, Issue 11, 2002, Pages 880-883

Amorphous SiC:H-layers from precursors

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CATALYSTS; CHEMICAL VAPOR DEPOSITION; POLYMERS; PYROLYSIS; SPIN COATING; STOICHIOMETRY; SYNTHESIS (CHEMICAL); VISCOSITY;

EID: 0036863817     PISSN: 14381656     EISSN: None     Source Type: Journal    
DOI: 10.1002/1527-2648(20021105)4:11<880::AID-ADEM880>3.0.CO;2-O     Document Type: Article
Times cited : (2)

References (12)
  • 8
    • 0012029955 scopus 로고    scopus 로고
    • Thesis, TU Bergakademie Freiberg
    • D. Kurtenbach, Thesis, TU Bergakademie Freiberg 2000.
    • (2000)
    • Kurtenbach, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.