Non-linear effect of gold cluster ion induced damage in silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 197, Issue 1-2, 2002, Pages 101-106

  Liu, J R ^a   Wang, X M ^a   Shao, L ^a   Chen, H ^a   Chu, W K ^a  

^a University of Houston   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; RADIATION DAMAGE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SINGLE CRYSTALS; SPUTTERING;

NONLINEAR EFFECTS;

ION IMPLANTATION;

EID: 0036858060     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01357-5     Document Type: Article

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