Crystallization of amorphous hydrogenated silicon films deposited under various conditions

Semiconductors

Volumn 36, Issue 10, 2002, Pages 1180-1183

  Golikova, O A ^a   Bogdanova, E V ^a   Babakhodzhaev, U S ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036807433     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1513865     Document Type: Article

References (13)

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