A self-aligned fabrication process for silicon quantum computer devices

Nanotechnology

Volumn 13, Issue 5, 2002, Pages 686-690

  Buehler, T M ^a   McKinnon, R P ^a   Lumpkin, N E ^a   Brenner, R ^a   Reilly, D J ^a   Macks, L D ^a   Hamilton, A R ^a   Dzurak, A S ^a   Clark, R G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTERS; ELECTRON BEAMS; EVAPORATION; MASKS; SILICON; TRANSISTORS;

QUANTUM COMPUTERS; SINGLE-ELECTRON TRANSISTORS (SET);

QUANTUM ELECTRONICS;

EID: 0036801266     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/5/330     Document Type: Article

References (17)

1. Steane A. 1998 Rep. Prog. Phys. 61 117.
2. Shor P.W. 1994 Proc. 35th Annu. Symp. on Foundations of Computer Science ed S. Goldwasser (Los Alamitos, CA: IEEE Computer Society) p 124.
3. Grover L.K. 1997 Phys. Rev. Lett. 79 325.
4. Kane B.E. 1998 Nature 393 133.
5. Kane B.E. 2000 Fortschr. Phys. 48 1023 (Preprint quant-ph/0003031).
6. Vrijen R., Yablonovitch E., Wang K., Jiang H.W., Balandin A., Roychowdhury V., Mor T. and DiVincenzo D. 2000 Phys. Rev.A. 62 012306.
7. O'Brien J.L., Schofield S.R., Simmons M.Y., Clark R.G., Dzurak A.S., Curson N.J., Kane B.E., McAlpine N.S., Hawley M.E. and Brown G.W. 2001 Phys. Rev.B. 64 161401.
8. Fulton T.A. and Dolan G.J. 1987 Phys. Rev. Lett. 59 109.
9. Dolan G.J. 1977 Appl. Phys. Lett. 31 337.
10. McKinnon R.P., Stanley F.E., Macks L.D., Mitic M., Gauja E., Peceros K., Buehler T.M., Dzurak A.S., Clark R.G., Yang C., Jamieson D.N., Prawer S., Pakes C.I. and McCallum J.C. 2002 in preparation Yang C., Jamieson D.N., Hearne S.M., Pakes C.I., Prawer S.D., Stanley F.E., Macks L.D.M., Gauja E., Dzurak A.S. and Clark R.G. in preparation.
11. McKinnon R.P., Stanley F.E., Macks L.D., Mitic M., Gauja E., Peceros K., Buehler T.M., Dzurak A.S., Clark R.G., Yang C., Jamieson D.N., Prawer S., Pakes C.I. and McCallum J.C. 2002 in preparation Yang C., Jamieson D.N., Hearne S.M., Pakes C.I., Prawer S.D., Stanley F.E., Macks L.D.M., Gauja E., Dzurak A.S. and Clark R.G. in preparation.
12. Jamieson D.N., Prawer S., Andrienko I., Brett D.A., Millar V., Yang C. and Cimmino A. 2001 Proc. Int. Conf. on Experimental Implementation of Quantum Computation ed R.G. Clark and A.R. Hamilton (Princeton, NJ, USA: Rinton Press).
13. Jamieson D.N. 2001 private communication.
14. Marks N.A., Hee Lee K. and McKenzie D.R. 2001 Proc. Int. Conf on Experimental Implementation of Quantum Computation ed R.G. Clark and A.R. Hamilton (Princeton, NJ, USA: Rinton Press).
15. Chen W. and Ahmed H. 1993 Appl. Phys. Lett. 62 1499.
16. Buehler T.B., Brenner R., Reilly D.J., Hamilton A.R., Dzurak A.S. and Clark R.G. 2002 Smart Mater. Struct. at press.
17. Nakamura Y., Klein D.L. and Tsai J.S. 1996 Appl. Phys. Lett. 68 275.