Optical constants of silicon and silicon dioxide using soft X-ray reflectance measurements

Optics Communications

Volumn 211, Issue 1-6, 2002, Pages 215-223

  Tripathi, Pragya ^a   Lodha, G S ^a   Modi, M H ^a   Sinha, A K ^a   Sawhney, K J S ^a   Nandedkar, R V ^a  

^a RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

Complex dielectric constants; Optical constants; Reflection; Silicon; Silicon dioxide; Soft X ray; Synchrotron radiation

Indexed keywords

IRRADIATION; LIGHT MEASUREMENT; LIGHT REFLECTION; PERMITTIVITY; SILICA; SILICON WAFERS; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; X RAY OPTICS;

OPTICAL CONSTANTS;

LIGHT ABSORPTION;

EID: 0036788094     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(02)01950-8     Document Type: Article

References (17)

1. Spiller E. Soft X-ray Optics. 1994;SPIE, Bellingham, WA, USA.
2. Henke B.L., Gullikson E.M., Davis J.C. At. Data Nucl. Data Tables. 54:1993.
3. N.K. Del Grande, P. Lee, J.A. Samson, D.Y. Smith (Eds.), Proc. SPIE, 911 (1988) 86-99.
4. Lodha G.S., Yamashita K., Kuneida H., Tawara Y., Yu J., Namba Y., Bennet J.M. Appl. Opt. 37:1998;5239.
5. Soufli R., Gullikson E.H. Appl. Opt. 36:1997;5499.
6. Herzinger C.M., Johs B., McGahan W.A., Woollam J.A. J. Appl. Phys. 83:1998;3323.
7. Palik E.D. Handbook of optical constants of solids. 1998;749 Academic, Orlando.
8. Zukie M., Torr D.G., Spann J.F., Torr M.R. Appl. Opt. 29:1990;4284.
9. Windt D.L., Cash W.C. Jr., Scott M., Arendt P., Newnam B., Fisher R., Swartzlander A.B., Takacs P.Z., Pinnes J.M. Appl. Opt. 27:1988;279.
10. Filatova E.O., Stepanov A.I., Luk'yanov V.A. Opt. Spectrosc. 81:1996;416.
11. Filatova E., Lukyanov V. J. Electron Spectrosc. Relat. Phenom. 79:1996;63.
12. Filatova E., Lukyanov V., Barchewitz R., Andre J.M., Idir M., Stemmler Ph. J. Phys. Condes. Matter. 11:1999;3355.
13. Born M., Wolf E. Principles of Optics. sixth ed. 1980;55 Pergamon, Oxford.
14. Nevot L., Croce P. Rev. Phys. Appl. 15:1980;761.
15. Hausen R.W.C., Wolske J., Wallace D., Bissen M. NIM A. 347:1994;249.
16. Takahagi T., Nagai I., Ishitani A., Kuroda H. J. Appl. Phys. 64:1988;3516.
17. Nandedkar R.V., Sawhney K.J.S., Lodha G.S., Verma A., Raghuvanshi V.K., Sinha A.K., Modi M.H., Nayak M. Curr. Sci. 82:2002;298.