Submicron lines in thin metal films micromachined by an ultrafast laser oscillator

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 1998, Pages 511-

  Liu, X ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ABLATION; LASER APPLICATIONS; LASER BEAMS; OSCILLATORS (ELECTRONIC); SILICON WAFERS; WAVEGUIDE ISOLATORS;

SUBMICRON LINES; ULTRAFAST LASER OSCILLATOR;

LASER PULSES;

EID: 0031621341     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/cleo.1998.676563     Document Type: Conference Paper

References (3)