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Volumn 244, Issue 2, 2002, Pages 206-210
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Effects of a Ti interlayer on formation of β-FeSi2 on Si(0 0 1) substrates
a
a
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Author keywords
A1. Crystal structure; A1. X ray diffraction; B2. Semiconducting silicon compounds
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Indexed keywords
CRYSTAL GROWTH;
DIFFUSION;
IRON;
SEMICONDUCTING SILICON;
SUBSTRATES;
TITANIUM;
X RAY DIFFRACTION;
SOLID PHASE REACTIONS;
CRYSTAL STRUCTURE;
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EID: 0036776652
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(02)01605-6 Document Type: Article |
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Times cited : (7)
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References (17)
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