Transient measurement of surface deflection for beams and membranes in micromechanical devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3411, Issue , 1998, Pages 618-623

  Klein, A ^a   Schroth, A ^a   Gerlach, G ^a   Maeda, R ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Beam deflection; Laser interferometer; Membrane oscillation; MEMS devices

Indexed keywords

INTERFEROMETERS; LASER BEAM EFFECTS; MIRRORS; OSCILLATIONS; VIBRATION MEASUREMENT;

LASER INTERFEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032403481     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.307748     Document Type: Conference Paper

References (7)

1. Silicon as a mechanical material
2. Anisotropic etching of silicon
3. Single fluidic elements and their combination towards complex fluid handling systems
4. Application of SOL-GEL deposited thin PZT films for actuation of 1D and 2D scanners