Direct magnetic patterning of nonferromagnetic Co-C thin films by electron-beam radiation

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 1970-1972

  Zhou, T J ^a   Zhao, Y ^b   Wang, J P ^b   Chong, T C ^b   Thong, J T L ^b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

CoC thin films; Electron beam radiation; Magnetic phase change; Patterned magnetic nanostructure

Indexed keywords

AMORPHOUS MATERIALS; COBALT ALLOYS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; GLASS; HEAT CONDUCTION; NANOSTRUCTURED MATERIALS; SPUTTERING;

MAGNETIC PATTERNING;

MAGNETIC THIN FILMS;

EID: 0036763381     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802785     Document Type: Article

References (20)

1. 2 density for ultrahigh density quantum magnetic storage," J. Appl. Phys., vol. 76, pp. 6673-6675, 1994.
2. 2 recording," J. Appl. Phys., vol. 79, pp. 4485-4490, 1996.
3. S.Y. Chou, "Patterned magnetic nanostructures and quantized magnetic disks," Proc. IEEE, vol. 85, pp. 652-671, Apr. 1997.
4. G.A. Prinz, "Magnetoelectronics," Science, vol. 282, pp. 1660-1663, 1998.
5. R.M.H. New, R.F.W. Pease, and R.L. White, "Physical and magnetic properties of submicron lithographically patterned magnetic islands," J. Vac. Sci. Technol. B, vol. 13, pp. 1089-1094, 1995.
6. S.Y. Chou, P.R. Kranss, and P.B. Fischer, "Imprint lithography with 25-Nanometer resolution," Science, vol. 272, pp. 85-87, 1996.
7. F.J. Hohn, "Electron beam lithography: Its applications," J. Vac. Sci. Technol. B, vol. 7, pp. 1405-1411, 1989.
8. C. Chappert, H. Bernas, J. Ferre, V. Kottler, J.P. Jamet, Y. Chen, E. Cambril, T. Devolder, F. Rousseaux, V. Mathet, and H. Launois, "Planar patterned magnetic media obtained by ion irradiation," Science, vol. 280, pp. 1919-1922, 1998.
9. B.D. Terris, L. Folks, D. Weller, J.E.E. Baglin, A.J. Kellock, H. Rothuizen, and P. Vettiger, "Ion-beam patterning of magnetic films using stencil masks," Appl. Phys. Lett., pp. 403-405, 1999.
10. T. Devolder, C. Chappert, Y. Chen, E. Cambril, H. Bernas, J.P. Jamet, and J. Ferré, "Sub-50 nm planar magnetic nanostructures fabricated by ion irradiation," Appl. Phys. Lett., vol. 74, pp. 3383-3385, 1999.
11. T. Devolder, H. Bernas, D. Ravelosona, C. Chappert, S. Pizzini, J. Vogel, J. Ferré, J.-P. Jamet, Y. Chen, and V. Mathet, "Beam-induced magnetic property modifications: Basics, nanostructure fabrication and potential applications," Nucl. Instrum. Methods Phys. Res. B, vol. 175-177, pp. 375-381, 2001.
12. T. Aign, P. Meyer, S. Lemerle, J.P. Jamet, J. Ferré, V. Mathet, C. Chappert, J. Gierak, C. Vieu, F. Rousseaax, H. Launois, and H. Bernas, "Magnetization reversal in arrays of perpendicularly magnetized ultrathin dots coupled by dipolar interaction," Phys. Rev. Lett., vol. 81, pp. 5656-5659, 1998.
13. J. Lohau, A. Moser, C.T. Rettner, M.E. Best, and B.D. Terris, "Writing and reading perpendicular magnetic recording media patterned by a focused ion beam," Appl. Phys. Lett., vol. 78, pp. 990-992, 2001.
14. M. Zheng, M. Yu, Y. Liu, R. Skomski, S.H. Liou, D.J. Sellmyer, V.N. Petryakov, Y.K. Verevkin, N.I. Polushkin, and N.N. Salashchenko, "Ferromagnetic Co-C nanodot arrays produced by direct interferometric laser annealing," IEEE Trans. Magn., vol. 37, pp. 2070-2072, July 2001.
15. _, "Magnetic nanodot arrays produced by direct laser interference lithography," Appl. Phys. Lett., vol. 79, pp. 2606-2608, 2001.
16. A.D. Kent, S. Molnar, S. Gider, and D.D. Awschalom, "Properties and measurement of scanning tunneling microscope fabricated ferromagnetic particle arrays," J. Appl. Phys., vol. 76, pp. 6656-6660, 1994.
17. S. Tomino, H. Saito, and S. Ishio, "Ferromagnetic dot formation in nonmagnetic amorphous FeZr films by noncontact atomic force microscope," J. Magn. Magn. Mater., vol.. 212, pp. 69-74, 2000.
18. M. Yu, Y. Liu, and D.J. Sellmyer, "Structural and magnetic properties of nanocomposite Co:C films," J. Appl. Phys., vol. 85, pp. 4319-4321, 1999.
19. Y. Zhao, J.P. Wang, T.C. Chong, and T.J. Zhou, "Magnetic properties and microstructure of Co-C multilayer films," in INTERMAG Europe, Amsterdam, The Netherlands, 2002.
20. T.J. Zhou, Y. Zhao, J.P. Wang, J.T.L. Thong, and T.C. Chong, "Ferromagnetic nano-dot array fabricated by electron beam radiation induced nano-scale phase transition," J. Appl. Phys., vol. 91, pp. 6854-6856, 2002.