Designs, analyses, and tests of a spiral-grooved turbobooster pump

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 1016-1024

  Jou, Rong Yuan ^a   Cheng, Hong Ping ^a   Chang, Yu Wen ^a   Chen, Fong Zhi ^a   Iwane, Matsume ^b  

^a National Science Council   (Taiwan)

^b Kashiyama Industries Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; MAGNETIC BEARINGS; MONTE CARLO METHODS; PRESSURE EFFECTS; TRANSITION FLOW;

MOMENTUM-TRANSFER VACUUM PUMPS; SPIRAL-GROOVED TURBOBOOSTER PUMPS;

VACUUM PUMPS;

EID: 0034187388     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582293     Document Type: Article

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