Two kinds of enhancement in photoluminescence by chemical etching of porous silicon

Materials Science and Engineering: B

Volumn 95, Issue 3, 2002, Pages 287-289

  Ohmukai, Masato ^a   Mukai, Hayato ^a   Tsutsumi, Yasuo ^a  

^a NATIONAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chemical etching; Photoacoustic spectra; Photoluminescence; Porous silicon

Indexed keywords

ANODIC OXIDATION; ELECTRIC CONDUCTIVITY; ETCHING; PHOTOACOUSTIC EFFECT; PHOTOLUMINESCENCE; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; THERMAL EFFECTS;

PHOTOACOUSTIC SPECTROSCOPY;

POROUS SILICON;

EID: 0036723330     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00288-X     Document Type: Article

References (5)