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Volumn 17, Issue 9, 2002, Pages 918-923
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Optimized structure of SiNxCy-Si 〈111〉 interfaces
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Author keywords
[No Author keywords available]
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Indexed keywords
MOLECULAR DYNAMICS;
QUANTUM ELECTRONICS;
STOICHIOMETRY;
THIN FILMS;
VAPOR DEPOSITION;
SEMICONDUCTOR INTERFACES;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 0036715093
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/17/9/303 Document Type: Article |
Times cited : (2)
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References (17)
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