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Volumn 19, Issue 9, 2002, Pages 1329-1332
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A novel contactless method for characterization of semiconductors: Surface electron beam induced voltage in scanning electron microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
ELECTRONS;
IRRADIATION;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DEVICES;
SURFACE POTENTIAL;
CONTACTLESS METHODS;
CORE PART;
ELECTRON-BEAM;
INDUCED VOLTAGES;
IRRADIATION MODES;
NONDESTRUCTIVE METHODS;
SAMPLE SURFACE;
SEMI-CONDUCTOR SURFACES;
SURFACE ELECTRON;
VOLTAGE DETECTION;
ELECTRON BEAMS;
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EID: 0036714585
PISSN: 0256307X
EISSN: None
Source Type: Journal
DOI: 10.1088/0256-307X/19/9/335 Document Type: Article |
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Times cited : (6)
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References (8)
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