Synthesis of thick diamond films by direct current hot-cathode plasma chemical vapour deposition

Chinese Physics Letters

Volumn 19, Issue 9, 2002, Pages 1374-1376

  Jin, Zeng Sun ^a   Jiang, Zhi Gang ^a   Bai, Yi Zhen ^a   Lü, Xian Yi ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DIAMOND FILMS; MICROPROCESSOR CHIPS; SEMICONDUCTING FILMS; TEMPERATURE;

CATHODE PLASMAS; DIRECT-CURRENT; DISCHARGES CURRENTS; HIGH GAS PRESSURES; HIGH QUALITY; HOT CATHODES; PLASMA CHEMICAL VAPOR DEPOSITION; SYNTHESISED; TEMPERATURE RANGE; THICK DIAMOND FILMS;

GLOW DISCHARGES;

EID: 0036711564     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/19/9/349     Document Type: Article

References (6)