Sub-wavelength gratings based on a new microfabrication technology

Guangxue Xuebao/Acta Optica Sinica

Volumn 22, Issue 8, 2002, Pages 1008-1010

  Li, Yigui ^a   Chen, Di ^a   Zhu, Jun ^a   Yang, Chunsheng ^a   Kanamori, Y ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Electron beam scanning exposure; Fast atom beam etching; Sub wavelength gratings

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; FABRICATION; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM SCANNING EXPOSURE; FAST ATOM BEAM ETCHING; SUBWAVELENGTH GRATING;

OPTICAL DEVICES;

EID: 0036700788     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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