Quinhydrone/Methanol treatment for the measurement of carrier lifetime in silicon substrates

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 8 A, 2002, Pages

  Takato, Hidetaka ^a   Sakata, Isao ^a   Shimokawa, Ryuichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Lifetime; Polycrystalline silicon; Quinhydrone; Silicon; Surface passivation; PCD

Indexed keywords

CHARGE CARRIERS; CRYSTALLINE MATERIALS; METHANOL; MICROWAVES; PHOTOCONDUCTIVITY; SUBSTRATES; SURFACE TREATMENT;

CARRIER LIFETIME;

SILICON WAFERS;

EID: 0036694799     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l870     Document Type: Article

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