SCOPUS 정보 검색 플랫폼

Volumn 34, Issue 1, 2002, Pages 215-219

Elastic electron backscattering from silicon surfaces: Effect of surface roughness

(4) Zemek, J a Jiricek, P a Jablonski, A b Lesiak, B b

b INSTITUTE OF PHYSICAL CHEMISTRY (Poland)

Author keywords

Elastic peak electron spectroscopy; Electron elastic backscattering intensity; EPES; IMFP; Inelastic mean free path; Si; Surface roughness

Indexed keywords

BACKSCATTERING; ELASTICITY; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SPECTROSCOPY; NUMERICAL ANALYSIS; SURFACE MEASUREMENT; SURFACE ROUGHNESS;

ELASTIC ELECTRON BACKSCATTERING; ELASTIC PEAK ELECTRON SPECTROSCOPY; INELASTIC MEAN FREE PATH;

SILICON;

EID: 0036693061 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1286 Document Type: Conference Paper

Times cited : (14)

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