Silicon-on-insulator based nanoresonators for mechanical mixing at radio frequencies

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 8, 2002, Pages 1114-1117

  Erbe, Artur ^a   Blick, Robert H ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCIES; OSCILLATORS (ELECTRONIC); PHOTOLITHOGRAPHY; RESONATORS; SIGNAL PROCESSING;

NANORESONATORS; RADIO FREQUENCIES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0036692931     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2002.1026023     Document Type: Article

References (11)

1. Mechanical parametric amplification and thermomechanical noise squeezing
2. Evading amplifier noise in nonlinear oscillators
3. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
4. Suspending highly doped silicon-on-insulator wires for applications in nanomechanics
5. A mechanically flexible tunneling contact operating at radio frequencies
6. Nanomechanical resonators operating as charge detectors in the nonlinear regime
7. Mechanical mixing in nonlinear nanomechanical resonators
8. Parametric frequency tuning of phase-locked nanoelectromechanical resonators