Study of InP(100) surface nitridation by x-ray photoelectron spectroscopy

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 712-715

  Bideux, L ^a   Ould Metidji, Y ^a   Gruzza, B ^a   Matolin, V ^a,b  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

^b CHARLES UNIVERSITY   (Czech Republic)

Author keywords

InP; Nitridation; Nitrides; XPS

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; ION BOMBARDMENT; NITRIDING; OXIDES; PLASMA APPLICATIONS; REMOVAL; SUBSTRATES; THERMAL EFFECTS; ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

INDIUM PHOSPHIDE; ION BEAM NITRIDATION; RADIOFREQUENCY PLASMA SOURCE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0036692827     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1394     Document Type: Conference Paper

References (12)