Photoelectron signal simulation from textured samples with modified surface composition

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 597-600

  Vutova, K ^a   Mladenov, G ^a   Tanaka, T ^b   Kawabata, K ^b  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

^b HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Compositional depth profile; Mathematical model; Textured sample surface; X ray photoelectron spectroscopy (XPS); XPS angular intensity distribution

Indexed keywords

APPROXIMATION THEORY; CALCULATIONS; COMPUTER SIMULATION; ELECTRON EMISSION; MATHEMATICAL MODELS; PRISMS; SURFACE ROUGHNESS; SURFACE STRUCTURE; TEXTURES;

ANGULAR INTENSITY DISTRIBUTION; COMPOSITIONAL DEPTH PROFILE; PHOTOELECTRON INTENSITY DISTRIBUTION; PHOTOELECTRON SIGNAL SIMULATION; TEXTURED SAMPLE SURFACE; TRIANGULAR PRISM;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036692807     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1368     Document Type: Conference Paper

References (7)