Magnesium plasma immersion ion implantation in a large straight magnetic duct

Plasma Sources Science and Technology

Volumn 11, Issue 3, 2002, Pages 317-323

  Tan, Ing Hwie ^a   Ueda, Mario ^a   Dallaqua, Renato S ^a   Rossi, Jose O ^a   Beloto, Antonio F ^a   Abramof, Eduardo ^a   Inoue, Y ^b   Takai, Osamu ^b  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC ARCS; ION IMPLANTATION; LATTICE CONSTANTS; MAGNESIUM PRINTING PLATES; MAGNETIC FIELD EFFECTS; PLASMA DENSITY; RADIATION; SILICON WAFERS; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

HIGH RESOLUTION X RAY DIFFRACTION; MACROPARTICLE FILTERING; MAGNETIC DUCT; PLASMA IMMERSION ION IMPLANTATION;

PLASMA APPLICATIONS;

EID: 0036670455     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/3/314     Document Type: Article

References (17)

1. Protection of materials and structures from the low earth orbit space environment