Micromachined gas flow regulator for ion propulsion systems

IEEE Transactions on Aerospace and Electronic Systems

Volumn 38, Issue 3, 2002, Pages 982-988

  Bruschi, P ^a   Diligenti, A ^a   Piotto, M ^b  

^a UNIVERSITY OF PISA   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; BOROSILICATE GLASS; FLOW MEASUREMENT; MICROMACHINING; PRESSURE; SATELLITES; SEMICONDUCTOR DEVICE MANUFACTURE; TEMPERATURE;

ANODIC BONDING; GAS FLOW REGULATOR; GAS MASS FLOW; SILICON DIE;

ION PROPULSION;

EID: 0036662625     PISSN: 00189251     EISSN: None     Source Type: Journal    
DOI: 10.1109/TAES.2002.1039414     Document Type: Article

References (20)

1. Tang, W. C. (1998) Micromechanical devices at JPL for space exploration. In Proceedings of the 1998 IEEE Aerospace Conference, vol. 1, 1998, 461-470.
2. Janson, S., Helvajian, H.; Animoto, S.; Smit, G.; Meyer, D., and Feuerstein, S. (1998) Microtechnology for space systems. In Proceedings of the 1998 IEEE Aerospace Conference, vol. 1, 1998, 409-418.
3. Jilla, C. D., and Miller, D. W. (1995) Satellite design: Past, present and future. International Journal on Small Satellite Engineering, 1 (1995), 1-14.
4. Rayman, M. D., Varghese, P., Lehman, D. H., and Livesay, L. L. (2000) Results from the Deep Space 1 technology validation mission. Acta Astronautica, 47 (2000), 475-488.
5. Capacci, M., Matticari, G., Matucci, A., Minucci, M., Noci, G., and Severi, A. (1996) In Proceedings of AIAA 96-2991 32nd JPC, 1996, 1-9.
6. Diligenti, A., Nannini, A., Pieri, F., Piotto, M., and Noci, G. (2000) A micromachined Xenon flow regulator for space applications. Microelectronic Engineering, 53 (2000), 565-568.
7. Terry, S. C., Jerman, J. H., and Angell, J. B. (1979) A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Transactions on Electronic Devices, ED-26 (1979), 1880-1886.
8. Stenmark, L., Lang, M., Köhler, J., and Simu, U. (1997) Micro machined propulsion components. In Proceedings of 2nd Round Table on Micro/Nano Technologies for Space, 1997, 69-76.
9. Mastrangelo, C. H., Burns, M. A. and Burke, D. T. (1998) Microfabricated devices for genetic diagnostics. Proceedings of the IEEE, 86 1998, 1769-1787.
10. Henning, A. K. (1998) Microfluidic MEMS. In Proceedings of the 1998 IEEE Aerospace Conference, vol. 1, 1998, 471-486.
11. Roth, A. (1976) Vacuum Technology. Amsterdam: North Holland, 1976, 70-75.
12. Reid, R. C., Prausnitz, J. M., and Poling, B. E. (1987) The Properties of Gases and Liquids. New York: McGraw-Hill, 1987, 388-395.
13. Wallis, G., and Pomerantz, D. (1969) Field assisted glass-metal sealing. Journal of Applied Physics, 40 1969, 3946-3950.
14. Petersen, K. E. (1982) Silicon as a mechanical material. Proceedings of the IEEE, 70 (1982), 420-457.
15. Sze, S. M. (1994) Semiconductor Sensor. New York: Wiley, 1994, 50-55.
16. Rogers, T., and Kowal, J. (1995) Selection of glass, anoding bonding conditions and material compatibility for silicon-glass capacitive sensors. Sensors and Actuators A, 46-47 (1995), 113-120.
17. Grisnik, S. P. (1998) Measurements of Xenon viscosity as a function of low temperature and pressure. In NASA/TM-208409, 1998, 1-5.
18. Zucrow, M. J., and Hoffman, J. D. (1976) Gas Dynamics, vol. 1. New York: Wiley, 1976, 272-277.
19. Harley, J. C., Huang, Y., Bau, H. H., and Zemel, J. N. (1995) Gas flow in microchannels. Journal of Fluid Mech, 284 (1995), 257-274.
20. Arkilic, E. B., Schmidt, M. A., and Breuer, K. S. (1997) Gaseous slip flow in long microchannels. Journal of Microelectromechanical Systems, 6 (1997), 167-178.