A new process for removal of catalyst in carbon nanotube grown by hot-filament chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 A, 2002, Pages 4686-4688

  Lim, Hyuck ^a   Jung, Hunjoon ^a   Park, Cheolho ^a   Joo, Seungki ^a  

^a Seoul National University   (South Korea)

Author keywords

Carbon nanotube; Hot filament chemical vapor deposition (HFCVD); Ion mass doping system; Oxidation; Tip

Indexed keywords

ARGON; CATALYSTS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; DOPING (ADDITIVES); FURNACES; GROWTH (MATERIALS); ION BOMBARDMENT; OXIDATION; REMOVAL;

HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; ION MASS DOPING SYSTEM;

CARBON NANOTUBES;

EID: 0036656319     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4686     Document Type: Article

References (13)