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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 4, 2002, Pages 1222-1229

Investigation and reduction of spurious peaks caused by electron-stimulated desorption and outgassing by means of a grid heating method in a hot-cathode quadrupole residual gas analyzer

(1) Watanabe, Fumio a

a Sukegawa Electric Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGASSING; HEATING; IONIZATION; PLATINUM ALLOYS; PRESSURE MEASUREMENT; REDUCTION; SURFACES;

ELECTRON STIMULATED DESORPTION; EXTREME HIGH VACUUM; GRID HEATING; HOT CATHODE RESIDUAL GAS ANALYZER;

DESORPTION;

EID: 0036648321 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1479736 Document Type: Article

Times cited : (11)

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