A new systematic method of characterization for the strength of thin films on substrates - Evaluation of mechanical propertiesn by means of 'film projection'

Thin Solid Films

Volumn 414, Issue 1, 2002, Pages 91-98

  Kamiya, S ^a   Kimura, H ^a   Yamanobe, K ^a   Saka, M ^a   Abe H ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Adhesion; Diamond; Elastic properties; Stress

Indexed keywords

BUCKLING; CARBIDE CUTTING TOOLS; DEFORMATION; DEPOSITION; DIAMOND FILMS; ELASTIC MODULI; FRACTURE; INTERFACES (MATERIALS); LOADS (FORCES); RESIDUAL STRESSES; STRENGTH OF MATERIALS;

ELASTIC PROPERTIES;

THIN FILMS;

EID: 0036647880     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00426-1     Document Type: Article

References (19)