Coplanar waveguides supported by InGaP and GaAs/AlGaAs membrane-like bridges

Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 465-469

  Lalinsky T ^a   Drzik M ^b   Tomaska M ^c   Krnac M ^a   Hascik S ^a   Mozolova Z ^a   Klasovity M ^c   Kostic, I ^d  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INTERNATIONAL LASER CENTER   (Slovakia)

^c SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^d INSTITUTE OF INFORMATICS   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

HETEROJUNCTIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; STRESSES;

ACOUSTIC PRESSURE BULGING METHOD; MICROMECHANICAL DEVICES; MICROWAVE TRANSMISSION PROPERTIES;

WAVEGUIDES;

EID: 0036645861     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/4/320     Document Type: Article

References (13)

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7. Technology and performance of 150 nm gate length InGaP/InGaAs/GaAs pHEMT
8. Microwave monolithic integrated transmitted power sensors and their industrial and metrological application
9. Micromechanical coplanar waveguide compatible with pseudomorphic AlGaAs/InGaAs/GaAs based HFETs
10. Optical measurement of stress in thin membranes
11. Effects of stress on the stability of x-ray masks
12. Stresses in bi-metal thermostats
13. Mechanical treatment of semiinsulator (SI) GaAs (100) and its effect on geometrical and electro-physical parameters