Micromechanical coplanar waveguide compatible with pseudomorphic AlGaAs/InGaAs/GaAs based HFETs

Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, EDMO

Volumn , Issue , 2001, Pages 211-216

  Tomaska M ^a   Lalinsky T ^a   Krnac M ^a   Klasovity M ^a   Mozolova Z ^a   Hascik S ^a   Kostic I ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; FIELD EFFECT TRANSISTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVE DEVICES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES;

HETEROJUNCTION FIELD EFFECT TRANSISTOR; MEMBRANE-LIKE BRIDGE; MICROMECHANICAL COPLANAR WAVEGUIDE; POWER SENSOR;

WAVEGUIDES;

EID: 0035574069     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. High performance microshield line components
2. Coplanar transmission lines on thin substrates for high speed low loss propagation
3. Microwave monolithic integrated transmitted power sensors and their industrial and metrological application
4. Micromachined coplanar waveguide design and characterisation
5. Extension set for on-wafer microwave and optoelectronic measurements