Imprint lithography using thermo-polymerisation of MMA

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 429-433

  Sagnes, M ^a   Malaquin, L ^a   Carcenac, F ^a   Vieu, C ^a   Fournier, C ^b  

^a LAAS CNRS   (France)

^b Université Paul Sabatier   (France)

Author keywords

Activation volume; Imprint lithography; MMA; Nanofabrication; PMMA; Polymerisation

Indexed keywords

ETCHING; MONOMERS; NANOTECHNOLOGY; POLYMERIZATION; SILANES; SOLUTIONS; THERMOPLASTICS;

NANOIMPRINT LITHOGRAPHY (NIL);

LITHOGRAPHY;

LITHOGRAPHY;

EID: 0036643641     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00449-5     Document Type: Conference Paper

References (4)