Dynamic-Monte Carlo simulations of diamond-like carbon film synthesis by ion-assisted deposition

Surface and Coatings Technology

Volumn 128-129, Issue , 2000, Pages 85-88

  Miyagawa, Y ^a   Nakao, S ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPUTER SIMULATION; DISSOCIATION; ION BOMBARDMENT; MATHEMATICAL MODELS; MONTE CARLO METHODS; POSITIVE IONS; SYNTHESIS (CHEMICAL);

DIAMOND-LIKE CARBON FILMS; ION-ASSISTED DEPOSITION;

AMORPHOUS FILMS;

DEPOSITION; DIAMOND-LIKE CARBON; DIAMOND-LIKE COATING; MONTE CARLO SIMULATION;

EID: 0033925015     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00608-3     Document Type: Conference Paper

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