Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

Optical Engineering

Volumn 39, Issue 1, 2000, Pages 86-90

  De Groot, Peter ^a   De Lega, Xavier Colonna ^a   Stephenson, Dave ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; DIFFRACTION GRATINGS; OPTICAL PUMPING; SCANNING;

FLATNESS TESTING; SHAPE MEASUREMENT;

INTERFEROMETRY;

EID: 0033899902     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602339     Document Type: Article

References (16)

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