Characterization of TiN coatings post-treated by metal-plasma ion implantation process

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 201-207

  Wang, Da Yung ^a   Chiu, Ming Chieh ^b  

^a MINGDAO UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Cathodic arc evaporation (CAE); Ion implantation; Metal plasma; Oxidation; TiN

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CUTTING TOOLS; ION IMPLANTATION; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; TITANIUM NITRIDE; WEAR RESISTANCE;

WEAR PROTECTION;

COATINGS;

COATING; CUTTING TOOL; ION IMPLANTATION; OXIDATION; PLASMA TREATMENT; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0036641206     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00086-5     Document Type: Article

References (21)