SCOPUS 정보 검색 플랫폼

Volumn 54, Issue 1-3, 1998, Pages 266-269

Characterization of TiN films alternately treated with PVD and Cr ion implantation

Author keywords

Cathodic arc ion plating; Ion implantation; Physical vapour deposition; Tribology

Indexed keywords

CHARACTERIZATION; ION IMPLANTATION; ION SOURCES; IONS; THICK FILMS; TITANIUM NITRIDE; TRIBOLOGY; WEAR RESISTANCE;

CATHODIC ARC ION PLATING; PHYSICAL VAPOR DEPOSITION; PULSE ARC ION SOURCE;

DEPOSITION;

EID: 0032121387 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(98)00079-0 Document Type: Article

Times cited : (8)

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