Strain in cracked AlGaN layers

Journal of Applied Physics

Volumn 92, Issue 1, 2002, Pages 118-123

  Einfeldt, S ^a   Diesselberg M ^a   Heinke, H ^a   Hommel, D ^a   Rudloff, D ^b   Christen, J ^b   Davis, R F ^c  

^a UNIVERSITY OF BREMEN   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

^c North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGAN; ALGAN LAYERS; CATHODOLUMINESCENCE SPECTROSCOPY; CRACK SPACING; DEFORMATION POTENTIAL; EXPERIMENTAL DATA; FINITE ELEMENT SIMULATIONS; GAN TEMPLATE; HIGH RESOLUTION X RAY DIFFRACTION; INELASTIC STRAIN; SMALL CRACK; SPATIAL VARIATIONS; SPATIALLY RESOLVED; STRAIN PROFILES; THEORETICAL CALCULATIONS;

GALLIUM NITRIDE; STRAIN RELAXATION; X RAY DIFFRACTION;

CRACKS;

EID: 0036639026     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1481969     Document Type: Article

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