A metastable-induced electron spectroscopy study on the promotion of nitridation by oxygen/alkali pre-adsorbates at Si(1 0 0) surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 193, Issue 1-4, 2002, Pages 460-465

  Nishigaki, S ^a   Sugiman, T ^a   Ikari, T ^a   Yokoh, I ^a   Yamada, K ^b   Naitoh, M ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b ISHIKAWA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Alkali metals; Auger ejection; Chemisorption; Metastable induced electron spectroscopy; Nitrogen molecule; Silicon

Indexed keywords

ADSORPTION; ALKALI METALS; CHEMISORPTION; DENSITY (SPECIFIC GRAVITY); ELECTRON EMISSION; ELECTRON SPECTROSCOPY; ELECTRONIC STRUCTURE; NITROGEN;

NITRIDATION; PRE-ADSORBATES;

SILICON;

EID: 0036608980     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00821-2     Document Type: Article

References (21)

1. Silicon nitride: Preparation and properties