Electrochemical properties of plasma-modified Si surfaces

Surface Science

Volumn 507-510, Issue , 2002, Pages 695-699

  Gabouze, N ^a  

^a L'Unite de Developpement de la Technologie du Silicium   (Algeria)

Author keywords

Coatings; Electrochemical methods; Silicon; Surface structure, morphology, roughness, and topography

Indexed keywords

DEPOSITION; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMISTRY; HYDROCARBONS; PLASMAS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SURFACE ROUGHNESS;

PLASMA MODIFICATION;

SURFACE PROPERTIES;

EID: 0036608639     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)01338-9     Document Type: Conference Paper

References (15)