Self-aligned porous silicon optical waveguides

Electronics Letters

Volumn 33, Issue 20, 1997, Pages 1724-1725

  Arrand, H F ^a   Benson, T M ^a   Loni, A ^b   Krueger, M G ^c   Thoenissen, M ^c   Lueth, H ^c  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Optical waveguides; Silicon

Indexed keywords

HIGH TEMPERATURE OPERATIONS; PHOTOLITHOGRAPHY; POROUS SILICON; REFRACTIVE INDEX; SILICON WAFERS; THERMOOXIDATION;

POROUS SILICON OPTICAL WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 0031221275     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19971144     Document Type: Article

References (11)

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