In-plane microactuator for fluid control application

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 454-459

  Sherman, Faiz ^a   Tung, Steve ^a   Kim, Chang Jin ^a   Ho, Chih Ming ^a   Woo, Jason ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRAG; ELECTROSTATIC DEVICES; FLOW CONTROL; MASKS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; ROBUSTNESS (CONTROL SYSTEMS); SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VISCOUS FLOW; WALL FLOW;

MICROACTUATORS; STOKE'S FLOW;

ACTUATORS;

EID: 0031681678     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)