Development of RF/microwave on-chip inductors using an organic micromachining process

IEEE Transactions on Advanced Packaging

Volumn 25, Issue 2, 2002, Pages 244-247

  Ramachandran, Ramakrishnan ^a   Pham, Anh Vu H ^b  

^a CLEMSON UNIVERSITY   (United States)

^b University of California Davis   (United States)

Author keywords

Inductors; Micromachining; Organic; RF microwave; UV LIGA

Indexed keywords

MICROMACHINING; MICROPROCESSOR CHIPS; MICROWAVE CIRCUITS; PHOTORESISTS; Q FACTOR MEASUREMENT; SUBSTRATES;

ORGANIC MICROMACHINING PROCESS;

ELECTRIC INDUCTORS;

EID: 0036589409     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/TADVP.2002.803264     Document Type: Conference Paper

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