Charge storage effect in the microwave detected photoconductive decay method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 A, 2002, Pages 2796-2800

  Munakata, Chusuke ^a,b   Watanabe, Kikuo ^a  

^a TOHOKU INSTITUTE OF TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Carrier lifetime; Depletion layer; Oxide charge; Photocarrier; Photoconductivity; Strong inversion; Surface potential; Surface recombination; Volume recombination

Indexed keywords

CARRIER CONCENTRATION; DIFFUSION; ETCHING; MICROWAVE MEASUREMENT; PHOTOCONDUCTIVITY;

PHOTOCONDUCTIVE DECAY (PCD);

SILICON WAFERS;

EID: 0036578203     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.2796     Document Type: Article

References (23)