Modelling the ultraviolet irradiation effect on the effective minority carrier recombination lifetime of silicon wafers

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 994-1001

  Lee, W P ^a   Khong, Y L ^a,b   Seow, W S ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

^b Kulim Hi Tech Park   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009774457     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369220     Document Type: Article

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